Common Subsystems

For more information on Common Subsystems, please refer to the configured COMT# Template SFS.

After Vacuum Flag

  1. Turns On:

    1. (Following EO Inject or EO dwell phase whenever Vacuum Pump is ON) AND (estimated EO concentration OR when available measured EO concentration is greater than High Concentration End Limit).

  2. Turns Off:

    1. When the estimated EO concentration AND when available measured EO concentration are less than High Concentration End Limit.

Cycle Complete

Turns ON at the end of the cycle when the door is opened and chamber enters dormant.

Cycle in Progress

  1. Turns On:

    1. When a cycle is started.

  2. Turns Off:

    1. (Door interlock is satisfied AND End Phase AND Not Dormant) OR  Dormant.

Emission Control Request

The emission control request output will tell the emission control system to prepare to receive EO flow from the vacuum pump.

  1. Turns On: 

    1. So many seconds (emission control lead time parameter 55) before the end of EO Dwell OR

    2. During the first Vacuum phase occurring after EO Inject when the EO concentration is greater than 13.5 mg/l OR

    3. If high pressure alarm occurs during EO Dwell.

  2. Turns Off:

    1. High Concentration End Limit (Parameter 56) is NOT set and in the last Air In-bleed phase OR

    2. When estimated EO concentration is less than High Concentration End Limit (Parameter  56) OR

    3. Chamber is in Dormant sequence.

User OK

  1. OFF State: If enabled (i.e. equipment configuration “User OK Hold Enabled” Keyword 15 is set to true), an event will be raised and the beacon will be activated; the chamber will go into a mode according to event configuration.

  2. ON state: When User OK signal comes back on, or is no longer enabled (i.e. Keyword 15 is set to false), an event will be raised and the beacon will be activated; the chamber will remain in the previous mod.e

Remote Hold

If Remote Hold signal turns OFF while Emission Control Output is ON, the following will occur:

  1. Chamber goes on Hold if “Remote Hold Enabled” (Keyword ID 2) is true.

    1. Alarm 318 will be raised: “Remote Hold signal turned off while Remote Hold Enabled option was true”.

  2. If “Remote Hold Enabled” (Keyword ID 2) is false:

    1. Alarm 96 will be raised: “Remote Hold signal has turned off”.

  3. If in Vacuum phase then:

    1. Vacuum block valve closes.

    2. Any vacuum pump motor stays on.

    3. Anti-cavitation block valve stays on.

If Remote Hold signal turns OFF while Emission Control Output is OFF, there is no impact on chamber operation.

Remote Hold signal turns ON:

  1. If the Emission Control Output is OFF, it will have no impact on chamber operation.

  2. If the Emission Control Output is ON and no other Hold occurred, chamber will resume normal operation.

    1. Alarm 319 will be raised: “Remote Hold signal turned on while Emission Control output is on.”

Building Power

The system will monitor the presence of building power.

Operation

  1. If the system detects absence of building power, all analog and discrete outputs will turn off after a 60 second delay.

  2. Chamber will go into Stop mode.

  3. When the condition is reset, normal product process can resume after a 10 second delay.

Emergency Stop

The system will monitor the emergency stop condition.

Operation

  1. If emergency stop is activated, all analog and discrete inputs will turn off.

  2. Chamber will go into Stop mode.

  3. A hardwired reset button will reset the emergency stop condition after the Emergency stop button has been pulled back to the normal position.

  4. When the condition is reset, normal product process can resume after a 10 second delay.